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Institution	Date	Title	Author
國立交通大學	2014-12-12T01:15:44Z	化學機械研磨混貨製程晶圓內部平坦度研究	李正廉; Lee, Zeng-Lien; 李安謙; Lee, An-Chen
國立交通大學	2014-12-08T15:22:30Z	Modified Double EWMA Approach for Mixed Product Run-to-Run CMP Process Control	Lee, An-Chen; Kuo, Tzu-Wei; Lee, Zeng-Lien

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