臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立交通大學	2014-12-12T02:14:49Z	電漿輔助化學氣相沉積之介電質在化學機械研磨中特性與製程整合之研究	林啟發; Lin, Chi-Fa; 馮明憲; Ming-Shiann Feng
國立成功大學	2000-03-15	Formation and characteristics of silicon nanocrystals in plasma-enhanced chemical-vapor-deposited silicon-rich oxide	Lin, Chi-Fa; Tseng, Wei-Tsu; Feng, Ming Shiann
國立成功大學	1999-05	Process optimization and integration for silicon oxide intermetal dielectric planarized by chemical mechanical polish	Lin, Chi-Fa; Tseng, Wei-Tsu; Feng, Ming-Shiann

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