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教育部委託研究計畫      計畫執行:國立臺灣大學圖書館
 
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機構 日期 題名 作者
國立成功大學 2004-09 Direct COSi2 thin-film formation with homogeneous nanograin-size distribution by oxide-mediated silicidation Chang, Juin-Jie; Liu, Chuan-Pu; Chen, Shih-Wei; Chang, Chih-Chia; Hsieh, Tsung-Eong; Wang, Ying-Lang
國立成功大學 2004-09 Influence of substrate bias on practical adhesion, toughness, and roughness of reactive dc-sputtered zirconium nitride films Chen, Cheng-Shi; Liu, Chuan-Pu; Yang, Heng-Ghieh; Tsao, C. Y. A.
國立成功大學 2004-05 Influence of the preferred orientation and thickness of zirconium nitride films on the diffusion property in copper Chen, Cheng-Shi; Liu, Chuan-Pu; Yang, Heng-Ghieh; Tsao, Chi Y. A.
國立成功大學 2004-03 Synthesis of cobalt nanoparticles by DC magnetron sputtering and the effects of electron bombardment Chung, Bing-Xian; Liu, Chuan-Pu
國立成功大學 2004-01-30 Monitor and eliminate the circular defects in HDP-STI deposition through oxynitride/oxide composite liner Lan, Jin-Kun; Wang, Ying-Lang; Liu, Chuan-Pu; Lee, Wen-His; Ay, Chyung; Cheng, Yi-Lung; Chang, Shih-Chieh
國立成功大學 2004-01-30 Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect Chen, K. W.; Wang, Y. L.; Liu, Chuan-Pu; Yang, K.; Chang, L.; Lo, K. Y.; Liu, C. W.
國立成功大學 2004-01-30 Study on precipitations of fluorine-doped silicon oxide Wu, Jun; Wang, Ying-Lang; Liu, Chuan-Pu; Chang, Shih-Chieh; Kuo, Cheng-Tzu; Ay, Chyung
國立成功大學 2004-01-30 Fluorine-modified low-k a-SiOC : H composite films prepared by plasma enhanced chemical vapor deposition JangJean, Shiuh-Ko; Liu, Chuan-Pu; Wang, Ying-Lang; Hwang, Weng-Sing; Tseng, Wei-Tsu; Chen, Sheng-Wen; Lo, Kuang-Yao
國立成功大學 2004-01-30 Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material Cheng, Y. L.; Wang, Y. L.; Wu, Y. L.; Liu, Chuan-Pu; Liu, C. W.; Lan, J. K.; O'Neil, M. L.; Ay, Chyung; Feng, M. S.
國立成功大學 2003-11-15 The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer Chiu, Shao-Yu; Wang, Ying-Lang; Liu, Chuan-Pu; Lan, Jin-Kun; Ay, Chyung; Feng, Ming-Shiann; Tsai, Ming-Shih; Dai, Bau-Tong

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