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機構 日期 題名 作者
國立成功大學 2004-01-30 Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect Chen, K. W.; Wang, Y. L.; Liu, Chuan-Pu; Yang, K.; Chang, L.; Lo, K. Y.; Liu, C. W.
國立成功大學 2004-01-30 Study on precipitations of fluorine-doped silicon oxide Wu, Jun; Wang, Ying-Lang; Liu, Chuan-Pu; Chang, Shih-Chieh; Kuo, Cheng-Tzu; Ay, Chyung
國立成功大學 2004-01-30 Fluorine-modified low-k a-SiOC : H composite films prepared by plasma enhanced chemical vapor deposition JangJean, Shiuh-Ko; Liu, Chuan-Pu; Wang, Ying-Lang; Hwang, Weng-Sing; Tseng, Wei-Tsu; Chen, Sheng-Wen; Lo, Kuang-Yao
國立成功大學 2004-01-30 Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material Cheng, Y. L.; Wang, Y. L.; Wu, Y. L.; Liu, Chuan-Pu; Liu, C. W.; Lan, J. K.; O'Neil, M. L.; Ay, Chyung; Feng, M. S.
國立成功大學 2003-11-15 The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer Chiu, Shao-Yu; Wang, Ying-Lang; Liu, Chuan-Pu; Lan, Jin-Kun; Ay, Chyung; Feng, Ming-Shiann; Tsai, Ming-Shih; Dai, Bau-Tong
國立成功大學 2003-11-01 Systematic study of the evolution of texture and electrical properties of ZrNx thin films by reactive DC magnetron sputtering Liu, Chuan-Pu; Yang, Heng-Ghieh
國立成功大學 2003-09 Mechanisms of circular defects for shallow trench isolation oxide deposition Lan, Jin-Kun; Wang, Ying-Lang; Liu, Chuan-Pu; Chao, Chuen-Guang; Ay, Chyung; Liu, Chi-Wen; Cheng, Yi-Lung
國立成功大學 2003-08-15 Deposition temperature and thickness effects on the characteristics of dc-sputtered ZrNx films Liu, Chuan-Pu; Yang, Heng-Ghieh
國立成功大學 2003-06-30 In situ fluorine-modified organosilicate glass prepared by plasma enhanced chemical vapor deposition JangJean, Shiuh-Ko; Wang, Ying-Lang; Liu, Chuan-Pu; Hwang, Weng-Sing; Tseng, Wei-Tsu; Liu, Chi-Wen
國立成功大學 2003-06 The relationship between nano-scale Sm211/Sm123 interfaces and superconductivity of Sm-Ba-Cu-O materials Chen, Shih-Yun; Chen, In-Gann; Liu, Chuan-Pu; Hsieh, Ping-Chi; Wu, Mow-Kuen
國立成功大學 2003-05 Nano on nano Yeoh, T. S.; Liu, Chuan-Pu; Swint, R. B.; Gaur, A.; Elarde, V. C.; Coleman, J. J.
國立成功大學 2003-01-22 Quantitative characterization of self-assembled coherent islands Liu, Chuan-Pu; Gibson, J.Murray
國立成功大學 2003-01-15 Integration of a stack of two fluorine doped silicon oxide film with ULSI interconnect metallization Cheng, Y. L.; Wang, Y. L.; Liu, Chuan-Pu; Wu, Y. L.; Lo, K. Y.; Liu, C. W.; Lan, J. K.; Ay, Chyung; Feng, M. S.
國立成功大學 2002-12-02 Growth of carbon nanotubes and nanowires using selected catalysts Liu, Ruo-Mei; Ting, Jyh-Ming; Huang, Jung-Chun Andrew; Liu, Chuan-Pu
國立成功大學 2002-08-01 Evolution of Ge/Si(001) islands upon oxidation and water etching Liu, Chuan-Pu
國立成功大學 2001-11 Characterization and reliability of low dielectric constant fluorosilicate glass and silicon rich oxide process for deep sub-micron device application Cheng, Y. L.; Wang, Ying-Lang; Liu, C. W.; Wu, Y. L.; Lo, Kuang-Yao; Liu, Chuan-Pu; Lan, J. K.
國立成功大學 2001-11 Integration of MOCVD titanium nitride with collimated titanium and ion metal plasma titanium for 0.18-mu m logic process Lan, J. K.; Wang, Ying-Lang; Lo, Kuang-Yao; Liu, Chuan-Pu; Liu, C. W.; Wang, JK; Cheng, Y. L.; Chau, C. G.
國立成功大學 2001-04 High-angle annular dark-field imaging of self-assembled Ge islands on Si(001) Liu, Chuan-Pu; Twesten, R. D.; Gibson, J. Murray

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