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"lung ca"
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| 國立交通大學 |
2014-12-08T15:49:17Z |
TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k
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Loong, WA; Chen, CW; Chang, YH; Lin, CM; Cui, Z; Lung, CA |
| 國立交通大學 |
2014-12-08T15:02:03Z |
Study on optimization of annular off-axis illumination using Taguchi method for 0.35 mu m dense line/space
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Loong, WA; Tseng, JC; Chen, TC; Lung, CA |
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