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Showing items 1-6 of 6 (1 Page(s) Totally)
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| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA
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Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN |
| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA
|
Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN |
| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Hierarchical kernel generation for SMO application
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Chang, J.H.-C.;Chen, C.C.-P.;Melvin III, L.S.; Chang, J.H.-C.; Chen, C.C.-P.; Melvin III, L.S.; CHUNG-PING CHEN |
| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Hierarchical kernel generation for SMO application
|
Chang, J.H.-C.;Chen, C.C.-P.;Melvin III, L.S.; Chang, J.H.-C.; Chen, C.C.-P.; Melvin III, L.S.; CHUNG-PING CHEN |
| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis
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Tsai, M.-F.;Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Tsai, M.-F.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN |
| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis
|
Tsai, M.-F.;Chang, S.-J.;Chen, C.C.P.;Melvin III, L.S.; Tsai, M.-F.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN |
Showing items 1-6 of 6 (1 Page(s) Totally)
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