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"melvin l s"
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| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA
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Chang, J.H.-C.;Chen, C.C.-P.;Melvin, L.S.; Chang, J.H.-C.; Chen, C.C.-P.; Melvin, L.S.; CHUNG-PING CHEN |
| 臺大學術典藏 |
2020-06-11T06:46:02Z |
Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA
|
Chang, J.H.-C.;Chen, C.C.-P.;Melvin, L.S.; Chang, J.H.-C.; Chen, C.C.-P.; Melvin, L.S.; CHUNG-PING CHEN |
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