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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立成功大學 1999-07-15 Reactive ion etching of Si SiGe in CF4/Ar and Cl-2/BCl3/Ar discharges Chang, Shoou-Jinn; Juang, Y. Z.; Nayak, D. K.; Shiraki, Y.

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