臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立成功大學	1999-07-15	Reactive ion etching of Si SiGe in CF4/Ar and Cl-2/BCl3/Ar discharges	Chang, Shoou-Jinn; Juang, Y. Z.; Nayak, D. K.; Shiraki, Y.

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