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| 東海大學 |
2006 |
Millisecond anneal and short-channel effect control in Si CMOS transistor performance
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Nieh, C.F.,?Ku, K.C.?,?Chen, C.H.,?Chang, H.,?Wang, L.T.,?Huang, L.P.,?Sheu, Y.M.,?Wang, C.C.,?Lee, T.L.,?Chen, S.C.,?Liang, M.S.,?Gong, J. |
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