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國立交通大學 |
2014-12-08T15:31:44Z |
Microwave Annealing of Phosphorus and Cluster Carbon Implanted (100) and (110) Si
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Cho, Ta-Chun; Lu, Yu-Lun; Yao, Jie-Yi; Lee, Yao-Jen; Sekar, Karuppanan; Tokoro, Nobuhiro; Onoda, Hiroshi; Krull, Wade; Current, Michael I.; Chao, Tien-Sheng |
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