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國立交通大學 |
2019-04-03T06:44:21Z |
AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition
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Tzou, An-Jye; Chu, Kuo-Hsiung; Lin, I-Feng; Ostreng, Erik; Fang, Yung-Sheng; Wu, Xiao-Peng; Wu, Bo-Wei; Shen, Chang-Hong; Shieh, Jia-Ming; Yeh, Wen-Kuan; Chang, Chun-Yen; Kuo, Hao-Chung |
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