臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立成功大學	2006-07	Analysis of the tribological mechanisms arising in the chemical mechanical polishing of copper-film wafers when using a pad with concentric grooves	Lin, Jen-Fin; Chen, Sheng-Chao; Ouyang, Yu-Long; Tsai, Ming-Shih

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