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Institution Date Title Author
國立東華大學 2007 Characterization of the Ultrathin HfO2 and Hf-Silicate Films Grown by Atomic Layer Deposition 陳美杏; Chen, Mei-Hsin; T. C. Chen;C. Yi. Peng;C. H. Tseng;M. H. Liao;M. H. Chen; C.I. Wu; M. Y. Chern; P. J. Tzeng; C. W. Liu

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