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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立中山大學 2007-05 Effects of Substrate Residue on Frequency Response of High-Tone Bulk Acoustic Resonator R.C. Lin;Y.C. Chen;P.T. Hsieh;K.S. Kao;C.M. Wang
國立中山大學 2007 Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators R.C. Lin; K.S. Kao; Y.C. Chen
國立中山大學 2006-12 Deposition and structural properties of R.F. magnetron sputtered ZnO thin films on Pt/Ti/SiNx/Si substrate for FBAR device R.C. Lin;K.S. Kao;C.C. Cheng;C.C. Lu;Y.C. Chen

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