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Institution Date Title Author
臺大學術典藏 2019-10-31T07:04:00Z Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage YUNG-YAW CHEN;C.W. Hung;Y.Y. Chen;M.S. Chen;F.C. Wang;S.T. Kiu;J.Y. Yen;S.F. Wen; S.F. Wen; J.Y. Yen; S.T. Kiu; F.C. Wang; M.S. Chen; Y.Y. Chen; C.W. Hung; YUNG-YAW CHEN
臺大學術典藏 2019-10-31T07:04:00Z Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage YUNG-YAW CHEN;C.W. Hung;Y.Y. Chen;M.S. Chen;F.C. Wang;S.T. Kiu;J.Y. Yen;S.F. Wen; S.F. Wen; J.Y. Yen; S.T. Kiu; F.C. Wang; M.S. Chen; Y.Y. Chen; C.W. Hung; YUNG-YAW CHEN

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