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"shen shih haur"

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Showing items 1-11 of 11  (1 Page(s) Totally)
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Institution Date Title Author
淡江大學 2005-05 Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing Chen, Yih-hang; Su, An-jhih; Shiu, Sheng-jyh; Yu, Cheng-ching; Shen, Shih-haur
國立臺灣大學 2005 Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing Chen, Yih-Hang; Su, An-Jhih; Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur
國立臺灣大學 2004 Multivariable control of multi-zone chemical mechanical polishing Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur; Su, An-Jhih
國立臺灣大學 2003 A pplication of soft landing to the process control of chemical mechanical polishing Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur
國立臺灣大學 2003 Robust operation of copper chemical mechanical polishing Kao, Yi-Chung; Yu, Cheng-Ching; Shen, Shih-Haur
國立臺灣大學 2003 Application of soft landing to the process control of chemical mechanical polishing Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur
國立臺灣大學 1999 Autotune identification for systems with right-half-plane poles and zeros Shen, Shih-Haur; Yu, Hong-Den; Yu, Cheng-Ching
國立臺灣大學 1996 Use of saturation-relay feedback for autotune identification Shen, Shih-Haur; Yu, Hong-Den; Yu, Cheng-Ching
國立臺灣大學 1996 Autotune Identification under Load Disturbance Shen, Shih-Haur; Wu, Jiun-Sheng; Yu, Cheng-Ching
國立臺灣大學 1992 Indirect feedforward control: multivariable systems Shen, Shih-Haur; Yu, Cheng-Ching
國立臺灣大學 1992 Derivation of transfer function from relay feedback systems Chang, Ren Chiou; Shen, Shih Haur; Yu, Cheng Ching

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