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教育部委托研究计画 计画执行:国立台湾大学图书馆
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"shen shih haur"的相关文件
显示项目 1-10 / 11 (共2页)
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| 淡江大學 |
2005-05 |
Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
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Chen, Yih-hang; Su, An-jhih; Shiu, Sheng-jyh; Yu, Cheng-ching; Shen, Shih-haur |
| 國立臺灣大學 |
2005 |
Batch Sequencing for Run-to-Run Control: Application to Chemical Mechanical Polishing
|
Chen, Yih-Hang; Su, An-Jhih; Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur |
| 國立臺灣大學 |
2004 |
Multivariable control of multi-zone chemical mechanical polishing
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Shiu, Sheng-Jyh; Yu, Cheng-Ching; Shen, Shih-Haur; Su, An-Jhih |
| 國立臺灣大學 |
2003 |
A pplication of soft landing to the process control of chemical mechanical polishing
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Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur |
| 國立臺灣大學 |
2003 |
Robust operation of copper chemical mechanical polishing
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Kao, Yi-Chung; Yu, Cheng-Ching; Shen, Shih-Haur |
| 國立臺灣大學 |
2003 |
Application of soft landing to the process control of chemical mechanical polishing
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Chiu, Jian-Bin; Yu, Cheng-Ching; Shen, Shih-Haur |
| 國立臺灣大學 |
1999 |
Autotune identification for systems with right-half-plane poles and zeros
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Shen, Shih-Haur; Yu, Hong-Den; Yu, Cheng-Ching |
| 國立臺灣大學 |
1996 |
Use of saturation-relay feedback for autotune identification
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Shen, Shih-Haur; Yu, Hong-Den; Yu, Cheng-Ching |
| 國立臺灣大學 |
1996 |
Autotune Identification under Load Disturbance
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Shen, Shih-Haur; Wu, Jiun-Sheng; Yu, Cheng-Ching |
| 國立臺灣大學 |
1992 |
Indirect feedforward control: multivariable systems
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Shen, Shih-Haur; Yu, Cheng-Ching |
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