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Institution Date Title Author
國立成功大學 2016-12 Effect of H-2/He plasma treatment on porous low dielectric constant materials Cheng, Yi-Lung; Haung, Chiao-Wei; Hung, Wei-Jie; Sun, Chung-Ren; Lee, Wen-Hsi
國立成功大學 2016-08-16 Effect of annealing temperature on electrical and reliability characteristics of HfO2/porous low-k dielectric stacks Cheng, Yi-Lung; Kao, Kai-Chieh; Chen, Giin-Shan; Fang, Jau-Shiung; Sun, Chung-Ren; Lee, Wen-Hsi

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