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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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2019臺灣學術機構典藏
研討會
機構典藏系統RC7版本已
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Institution Date Title Author
中原大學 2004-05-04 Method and system of frequency modulated end-point detection Szetsen Steven Lee
中原大學 2003-09-30 Spectroscopic method and related apparatus for measuring electrode gap distance Szetsen Steven Lee
中原大學 2002-09-17 Optical temperature measurement as an in situ monitor of etch rate Szetsen Steven Lee
中原大學 2002-08-27 Method of profile control in metal etching Szetsen Steven Lee
中原大學 2000-05-30 In-situ and non-intrusive method for monitoring plasma etch chamber condition utilizing spectroscopic technique Szetsen Steven Lee
中原大學 2000-05-16 Fabrication of field emitting tips Szetsen Steven Lee
中原大學 2000-04-18 In-situ particle monitoring Szetsen Steven Lee
中原大學 2000-02-08 Simultaneous in-situ optical sensing of pressure and etch rate in plasma etch chamber Szetsen Steven Lee
中原大學 1994 Growth of diamond from atomic hydrogen and a supersonic free jet of methyl radicals Szetsen Steven Lee;David W. Minsek;Daniel J. Vestyck;Peter Chen

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