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Showing items 106-130 of 180  (8 Page(s) Totally)
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Institution Date Title Author
國立中山大學 2004 CMP of Ultra Low-k Material Porous-Polysilazane (PPSZ) for Interconnect Applications T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;Y.C. Chang;T.Y. Tseng
國立中山大學 2004 CMP of low-k methylsilsesquiazane with oxygen plasma treatment for multilevel interconnect applications T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;Y.C. Chang;T.Y. Tseng
國立中山大學 2004 CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applications T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;T.Y. Tseng
國立中山大學 2004 A novel distributed charge storage with GeO2 nano-dots T.C. Chang;S.T. Yan;P.T. Liu;C.H. Hsu;M.T. Tang;S.M. Sze
國立中山大學 2004 Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications T.C. Chang;S.T. Yan;P.T. Liu;H. Aoki;S.M. Sze
國立中山大學 2004 Structrual characteristics and interfacial reactions of low dielectric constant porous polysilazane for Cu metallization J.H. Wang;P.T. Liu;T.C. Chang;L.J. Chen
國立中山大學 2004 CMP of ultra low-k Methylsilsesquiazane with oxygen plasma treatment for multilevel interconnect applications T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;S.T. Yan;H. Aoki;T.Y. Tseng
國立中山大學 2004 Method to improve chemical-mechanical-planarization polishing rate of low-k methyl-silsesquiazane for ultralarge scale integraged interconnect application T.C. Chang;T.M. Tsai;P.T. Liu;Y.C. Chang;J. Aoki;S.M. Sze;T.Y. Tseng
國立中山大學 2004 Quasisuperlattice storage: A concept of multilevel charge stoage T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學 2004 Cu-penetration induced breakdown mechanism for a-SiCN C.W. Chen;P.T. Liu;T.C. Chang;J.H. Yang;T.M. Tsai;H.H. Wu;T.Y. Tseng
國立中山大學 2004 Leakage behavior of the quasi-superlattice stack for multilevel charge storage T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學 2004 Investigation of the electrical properties and reliability of amorphous SiCN C.W. Chen;T.C. Chang;P.T. Liu;T.M. Tsai;C.H. Huang;J.M. Chen;T.Y. Tseng
國立中山大學 2004 Short-Channel Poly-Si thin film transistors with ultrathin chanel and self-alinged tungsten-clad source/drain H.W. Zan;T.C. Chang;S.P. Shih;D.Z. Peng;P.Y. Kuo;T.Y. Huang;C.Y.C. Chang;P.T. Liu
國立中山大學 2004 Quasisuperlattice storage: A concept of multilevel charge stoage T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;H.H. Wu;S.M. Sze
國立中山大學 2004 A method of fabricating superior oxide/nitride/oxide gate stack T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;S.H. Lin;S.M. Sze
國立中山大學 2004 High performance polycrystalline silicon thin film transistor with multiple nano-wire channels and LDD structure Y.C. Wu;T.C. Chang;P.T. Liu;H.W. Zan;Y.H. Tai
國立中山大學 2004 Silicide formation of Au thin films on (100) Si during annealing J.F. Chang;T.R. Young;Y. Yang;H.Y. Ueng;T.C. Chang
國立中山大學 2004 A novel approach for fabricating germanium nanocrystals for nonvolatile memory application T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;S.H. Lin;S.M. Sze
國立中山大學 2004 Study on eching profile of nanoporous silica C.W. Chen;T.C. Chang;P.T. Liu;T.S. Tsai;H.H. Wu;T.Y. Tseng
國立中山大學 2004 Study on the effect of electron beam curing on low-K porous organosilicate glass (OSG) material T.C. Chang;T.M. Tsai;P.T. Liu;C.W. Chen;T.Y. Tseng
國立中山大學 2004 Study on SONOS nonvolatile memeory technology using high-density plasma chemical vapor deposition T.C. Chang;S.T. Yan;P.T. Liu;C.W. Chen;S.H. Lin;S.M. Sze
國立中山大學 2004 Pattern profile distortion and stress evolution in nanoporous organosilicates after photoresist stripping P.T. Liu;T.C. Chang;C.W. Chen;T.Y. Tseng
國立中山大學 2004 Memory effect of oxide/SiC:O/Oxide sandwidthed structures T.C. Chang;S.T. Yan;F.M. Yang;P.T. Liu;S.M. Sze
臺大學術典藏 2003-05 An Internet-Based Multimedia Information Kiosk System for Intelligent Security Robot R. C. Luo; T. C. Chang; K. L. Su; REN-CHYUAN LUO
修平科技大學 2003 The synergistic effect of N2/H2 gases in the plasma passivation of siloxane-based low-k polymer films’ S. T. Chen;G. S. Chen;T. J. Yang;T. C. Chang;W. H. Yang

Showing items 106-130 of 180  (8 Page(s) Totally)
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