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Institution Date Title Author
國立中山大學 2003 The synergistic effects of N2/H2 gases in the plasma passivation of siloxane based low-k polymer films S.T. Chen;G.S. Chen;T.J. Yang;T.C. Chang;W.H. Yang
修平科技大學 2000 An optimal quasi-superlattice design to further improve thermal stability of tantalum nitride diffusion barriers G. S. Chen;S. C. Huang;S. T. Chen;T. J. Yang;P. Y. Lee;J. H. Jou;T. C. Lin

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