臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立成功大學	2006-04-27	Global and local residual stress in silicon carbide films produced by plasma-enhanced chemical vapor deposition	Chung, Chen-Kuei; Lin, Tzu-Yin; Duh, Jenq-Gong; Tsai, Ming-Qun
國立成功大學	2005-01	Fabrication and characterization of amorphous Si films by PECVD for MEMS	Chung, Chen-Kuei; Tsai, Ming-Qun; Tsai, Po-Hao; Lee, Chiapyng
國立成功大學	2004-07-19	碳化矽/碳微奈米複合薄膜製程與性質檢測之研究	蔡名琨; Tsai, Ming-Qun
國立成功大學	2004-07-19	碳化矽/碳微奈米複合薄膜製程與性質檢測之研究	蔡名琨; Tsai, Ming-Qun

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