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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立交通大學 2014-12-08T15:04:00Z SUPERIOR DAMAGE-IMMUNITY OF THIN OXIDES THERMALLY GROWN ON REACTIVE-ION-ETCHED SILICON SURFACE IN N2O AMBIENT UENG, SY; CHAO, TS; WANG, PJ; CHEN, WH; CHANG, DC; CHENG, HC
國立交通大學 2014-12-08T15:03:25Z IMPROVEMENT OF THIN OXIDES THERMALLY GROWN ON THE REACTIVE-ION-ETCHED SILICON SUBSTRATES UENG, SY; WANG, PW; KANG, TK; CHAO, TS; CHEN, WH; DAI, BT; CHENG, HC
國立交通大學 2014-12-08T15:03:25Z EFFECTS OF POLYSILICON ELECTRON-CYCLOTRON-RESONANCE ETCHING ON ELECTRICAL CHARACTERISTICS OF GATE OXIDES KANG, TK; UENG, SY; DAI, BT; CHEN, LP; CHENG, HC
國立交通大學 2014-12-08T15:03:12Z EFFECTS OF POSTETCHING TREATMENTS ON ELECTRICAL CHARACTERISTICS OF THERMAL OXIDES ON REACTIVE-ION-ETCHED SILICON SUBSTRATES CHENG, HC; UENG, SY; WANG, PW; KANG, TK; CHAO, TS
國立交通大學 2014-12-08T15:02:53Z Antenna charging effects on the electrical characteristics of polysilicon gate during electron cyclotron resonance etching Kang, TK; Ueng, SY; Dai, BT; Chen, LP; Cheng, HC

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