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Institution	Date	Title	Author
國立交通大學	2014-12-12T02:10:06Z	Plasma etching of Si and polycrystalline silicon with CCl□ F and its mixture gases	王芳崇; Wang, Fang-Chong; 龍文安; Long, Wen-An
國立交通大學	2014-12-12T02:09:55Z	以三氯氟甲烷及其混合氣體對矽與多晶矽的電漿蝕刻	王芳崇; WANG, FANG-CHONG; 龍文安; LONG, WEN-AN

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