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東海大學 |
2006 |
Effect of fabrication process on the charge trapping behavior of SiON thin films
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Wang, S.-Y.ac , Lue, H.-T.b, Lai, E.-K.bc, Yang, L.-W.a, Gong, J.c, Chen, K.-C.a, Hsieh, K.-Y.b, Ku, J.a, Lu, C.-Y. |
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