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Institution Date Title Author
國立成功大學 2009-10 Effects of Retaining Ring on Contact Stress Uniformity in Chemical Mechanical Planarization Yang, Tian-Shiang; Hu, Ian; Chen, Kuo-Shen; Liu, Chia-Liang; Wang, Yao-Chen
國立成功大學 2009-01 Modeling and calculation of slurry-chemistry effects on chemical-mechanical planarization with a grooved pad Wang, Yao-Chen; Yang, Tian-Shiang
國立成功大學 2008-07-28 化學機械平坦化製程之數值模擬與參數研究 王耀塵; Wang, Yao-Chen
國立成功大學 2008-07-28 化學機械平坦化製程之數值模擬與參數研究 王耀塵; Wang, Yao-Chen
國立成功大學 2007 Effects of pad grooves on chemical mechanical planarization Wang, Yao-Chen; Yang, Tian-Shiang

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