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Showing items 81-90 of 121  (13 Page(s) Totally)
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Institution Date Title Author
國立成功大學 2008-02 Mechanism of the metal-insulator-metal capacitance drift for advanced mixed-signal copper process device JangJian, Shiu-Ko; Wang, Ying-Lang; Liao, Mlao-Cheng; Chang, Hung-Jui; Juang, Yungder
國立成功大學 2008-02 Interface integration defect of copper and low-K materials beyond nano-scale copper damascene process Chen, Kel-Wei; Wang, Ying-Lang; Tsao, Jung-Chih; Juang, Yungder; Lee, Feng-Yi
國立成功大學 2008-02 The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film Chen, Sheng-Wen; Liu, Chuan-Pu; JangJian, Shiu-Ko; Wang, Ying-Lang
國立成功大學 2008-02 Mechanism of over-etching defects during Ta/TaN barrier resputtering in micro-trench for Cu metallization Tsao, Jung-Chih; Liu, Chuan-Pu; Wang, Ying-Lang; Chen, Kel-Wel; Lo, Kuang-Yao
國立成功大學 2008-02 Thermal properties of hydrogenated amorphous silicon prepared by high-density plasma chemical vapor deposition Hsao, Wen-Chu; Liu, Chuan-Pu; Wang, Ying-Lang
國立成功大學 2008-02 Controlling Ta phase in Ta/TaN bilayer by surface pre-treatment on TaN Tsao, Jung-Chih; Liu, Chuan-Pu; Wang, Ying-Lang; Wang, Yu-Sheng; Chen, Ke-Wei
國立成功大學 2008-01 Effect of bis-(3-sodiumsulfopropyl disulfide) byproducts on copper defects after chemical mechanical polishing Hung, Chi-Cheng; Lee, Wen-Hsi; Hu, Shao-Yu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2008-01 Study of pretreatment prior to silicon-oxycarbide deposition on Cu interconnect Huang, Chun-Chieh; Huang, Jow-Lay; Wang, Ying-Lang; Lo, Kuang-Yao
國立成功大學 2008 Suppression effect of low-concentration bis-(3-sodiumsulfopropyl disulfide) on copper electroplating Hung, Chi-Cheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2008 Investigation of bis-(3-sodiumsulfopropyl disulfide) (SPS) decomposition in a copper-electroplating bath using mass spectroscopy Hung, Chi-Cheng; Lee, Wen-Hsi; Hu, Shao-Yu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang

Showing items 81-90 of 121  (13 Page(s) Totally)
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