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Showing items 56-65 of 126  (13 Page(s) Totally)
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Institution Date Title Author
國立交通大學 2014-12-08T15:17:21Z Investigation of overpotential and seed thickness on damascene copper electroplating Chen, KW; Wang, YL; Chang, L; Li, FY; Chang, SC
國立交通大學 2014-12-08T15:17:21Z Heat, moisture and chemical resistance on low dielectric constant (low-k) film using diethoxymethylsilane (DEMS) prepared by plasma enhanced chemical vapor deposition Cheng, YL; Wang, YL; Lan, JK; Hwang, GJ; O'Neil, ML; Chen, CF
國立交通大學 2014-12-08T15:17:21Z Effect of deposition temperature and oxygen flow rate on properties of low dielectric constant SiCOH film prepared by plasma enhanced chemical vapor deposition using diethoxymethylsilane Cheng, YL; Wang, YL; Hwang, GJ; O'Neill, ML; Karwacki, EJ; Liu, PT; Chen, CF
國立交通大學 2014-12-08T15:17:21Z Precipitates formation and its impact on the structure of plasma-deposited fluorinated silicon oxide films Wu, J; Wang, YL; Kuo, CT
國立交通大學 2014-12-08T15:17:21Z The study of diffusion and nucleation for COSi2 formation by oxide-mediated cobalt silicidation Chang, JJ; Liu, CP; Hsieh, TE; Wang, YL
國立交通大學 2014-12-08T15:17:19Z Characterization and thermal stability of fluorosilicate glass films deposited by high density plasma chemical vapor deposition with different bias power Hsiao, WC; Liu, CP; Wang, YL; Cheng, YL
國立交通大學 2014-12-08T15:17:19Z Mechanism for Cu void defect on various electroplated film conditions Feng, HP; Cheng, MY; Wang, YL; Chang, SC; Wang, YY; Wan, CC
國立交通大學 2014-12-08T15:17:19Z Effects of plasma treatment in the tungsten process for chemical vapor deposition titanium nitride barrier film beyond nanometer technology Chen, KW; Wang, YL; Chang, L; Li, FY; Hwang, GJ
國立交通大學 2014-12-08T15:17:19Z Uniform COSi2 nano-nucleus formation by oxide mediated silicidation with a Ti capping layer Chang, JJ; Hsieh, TE; Liu, CP; Wang, YL
國立交通大學 2014-12-08T15:17:19Z Oxide-mediated fort-nation of epitaxy silicide on heavily doped Si surfaces and narrow width active region Chen, YM; Tu, GC; Wang, YL

Showing items 56-65 of 126  (13 Page(s) Totally)
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