臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
元智大學	May-15	Low pressure plasma voltage process for transformer coupling plasma dry etching	Chi-Yuan Lee; Huan-Chih Peng; Lee S.-J.; C.S. Chiou; Wei-Pin Lee; Chao-Hsuan Tsai
元智大學	2014-10-31	Low pressure plasma voltage process for transformer coupling plasma dry etching	Chi-Yuan Lee; Chao-Hsuan Tsai; Wei-Pin Lee
元智大學	2013	變壓耦合式蝕刻機臺之低壓製程電漿電位研究	李唯賓; Wei-Pin Lee

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