臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立臺灣科技大學	2005	Evaluation of the Thermal Stability of Reactively Sputtered (Ti,Zr)Nx Nano-Thin Films as Diffusion Barriers Between Cu and Silicon	Yu-Lin Kuo; Chiapyng Lee; Jing-Cheng Lin; Yee-Wen Yen; Wen-Horng Lee
國立臺灣科技大學	2004	Effect of Density on Diffusion Barrier Property of TiNx Films between Cu and Si	Wen-Horng Lee; Yu-Lin Kuo; Hong-Ji Huang; Chiapyng Lee

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