臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立高雄第一科技大學	2001.11	Study of phase transition and electrical resistivity of tantalum nitride films prepared by DC magnetron sputtering with OES detection system	Lu, Y.M;Weng, R.J;Hwang, W.S;Yang, Y.S; 楊玉森
國立成功大學	2001-11-01	Electrical properties of TaxNy films by implementing OES in the sputtering system	Lu, Yang-Ming; Weng, R. J.; Hwang, Weng-Sing; Yang, Y. S.

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