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Institution	Date	Title	Author
南台科技大學	2008	The characteristics and residual stress of aluminum nitride films grown by two-stage sputtering of mid-frequency power	林天財;鄭錫恩;劉伍健; Tien-Chai Lin; Hsyi-En Cheng; Shih-Hung Tang; Wu-Chien Liu; Antony H.C. Lee

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