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Institution	Date	Title	Author
國立成功大學	2010-07-14	磁控濺鍍氮氧化矽與電漿輔助化學氣相沈積氮化矽薄膜材料機械性質檢測和力學分析及其在微系統之應用	吳秉欣; Wu, Ping-Hsin
國立成功大學	2010-07-14	磁控濺鍍氮氧化矽與電漿輔助化學氣相沈積氮化矽薄膜材料機械性質檢測和力學分析及其在微系統之應用	吳秉欣; Wu, Ping-Hsin

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