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Institution Date Title Author
國立交通大學 2015-07-21T08:28:43Z Investigation of Barrier Property of Copper Manganese Alloy on Ruthenium Su, Yin-Hsien; Wu, Sze-Ann; Wu, Chia-Yang; Wang, Ying-Lang; Lee, Wen-Hsi
國立成功大學 2015-03 Investigation of Barrier Property of Copper Manganese Alloy on Ruthenium Su, Yin-Hsien; Wu, Sze-Ann; Wu, Chia-Yang; Wang, Ying-Lang; Lee, Wen-Hsi
國立成功大學 2014-03 A Study of Cu/CuMn Barrier for 22-nm Semiconductor Manufacturing Wu, Sze-Ann; Cheng, Yi-Lung; Wu, Chia-Yang; Lee, Wen-Hsi

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