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Institution Date Title Author
國立交通大學 2014-12-12T02:24:48Z 低介電常數材料氟化非晶系碳膜蝕刻特性研究 吳育恆; Wu Yu-Hen; 吳耀銓; 謝嘉民; 馮明憲; Yew-Chung, sermon, Wu; Jia-Ming Shieh; Ming-Shiann Feng

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