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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立臺灣大學 2003 A study of copper chemical mechanical polishing in urea–hydrogen peroxide slurry by electrochemical impedance spectroscopy Tsai, Tzu-Hsuan; Wu, Yung-Fu; Yen, Shi-Chern

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