臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立臺灣科技大學	2000	Effect of carbon sources on silicon carbon nitride films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor	K.H. Chen;L.C. Chen;X.-J. Guo;S.T. Lin;E.-K. Lin;H.J. Lo;C.-W. Wang;C.Y. Wen;J.J. Wu;Y.-C. Yu

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