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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立臺灣科技大學 2000 Effect of carbon sources on silicon carbon nitride films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor K.H. Chen;L.C. Chen;X.-J. Guo;S.T. Lin;E.-K. Lin;H.J. Lo;C.-W. Wang;C.Y. Wen;J.J. Wu;Y.-C. Yu

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