臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
元智大學	2008-05	A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method	李其源; Xuan-Yu Wang; Cheng-Jien Peng; Pei-Yen Chen; Pei-Zen Chang
元智大學	2008-05	The fabrication of silicon-based PZT microstructures using an aerosol deposition method	李其源; Xuan-Yu Wang; Yuh-Chung Hu; Wen-Pin Shih; Chih-Cheng Lee; Jung-Tang Huang; Pei-Zen Chang
元智大學	2006-03	Novel method for in-situ monitoring of thickness of silicon wafer during wet etching	李其源; 李碩仁; Pei-Zen Chang; Yung-Yu Chen; Ching-Liang Dai; Xuan-Yu Wang; Ping-Hei Chen
元智大學	2006-03	Novel method for in-situ monitoring of thickness of silicon wafer during wet etching	李其源; 李碩仁; Pei-Zen Chang; Yung-Yu Chen; Ching-Liang Dai; Xuan-Yu Wang; Ping-Hei Chen
元智大學	2006-01	The micro fabrication process of PZT thick film by aerosol deposition method	李其源; Xuan-Yu Wang; Pei-Yen Chen; Cheng-Jien Peng; Pei-Zen Chang

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