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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
國立成功大學 2004-10 Study of mechanical properties of PVD ZrN films, deposited under positive and negative substrate bias conditions Chen, Cheng-Shi; Liu, Chuan-Pu; Tsao, C. Y.A.; Yang, Heng-Ghieh
國立成功大學 2004-09 Influence of substrate bias on practical adhesion, toughness, and roughness of reactive dc-sputtered zirconium nitride films Chen, Cheng-Shi; Liu, Chuan-Pu; Yang, Heng-Ghieh; Tsao, C. Y. A.
國立成功大學 2004-05 Influence of the preferred orientation and thickness of zirconium nitride films on the diffusion property in copper Chen, Cheng-Shi; Liu, Chuan-Pu; Yang, Heng-Ghieh; Tsao, Chi Y. A.
國立成功大學 2003-11-01 Systematic study of the evolution of texture and electrical properties of ZrNx thin films by reactive DC magnetron sputtering Liu, Chuan-Pu; Yang, Heng-Ghieh
國立成功大學 2003-08-15 Deposition temperature and thickness effects on the characteristics of dc-sputtered ZrNx films Liu, Chuan-Pu; Yang, Heng-Ghieh
國立成功大學 2002-06-12 直流式磁控濺鍍鋯及氮化鋯薄膜性質、結構與擴散阻障層應用之研究 楊恆傑; Yang, Heng-Ghieh
國立成功大學 2002-06-12 直流式磁控濺鍍鋯及氮化鋯薄膜性質、結構與擴散阻障層應用之研究 楊恆傑; Yang, Heng-Ghieh

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