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Institution	Date	Title	Author
國立臺灣科技大學	2006	Reoxidation thickness nonuniformities due to thermally induced stress effect and the atomic oxygen distribution in RTP with N2O	Chang, K.-M.;Lai, C.-H.;Lin, B.-C.;Hsieh, K.-Y.;Yao, J.-M.;Chang, S.-H.;Lai, H.-L.;Lai, Y.-L.

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