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"yau c"
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| 臺大學術典藏 |
2018-09-10T05:18:50Z |
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches
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PING-HEI CHEN;et al.;WU, KY;YAU, C;CHEN, PH;PING-HEI CHEN; CHEN, PH; YAU, C; WU, KY; et al.; PING-HEI CHEN |
| 臺大學術典藏 |
2018-09-10T05:18:50Z |
Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches
|
PING-HEI CHEN;et al.;WU, KY;YAU, C;CHEN, PH;PING-HEI CHEN; CHEN, PH; YAU, C; WU, KY; et al.; PING-HEI CHEN |
Showing items 1-2 of 2 (1 Page(s) Totally)
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