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教育部委託研究計畫      計畫執行:國立臺灣大學圖書館
 
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機構 日期 題名 作者
國立交通大學 2014-12-08T15:46:33Z Application of selective liquid-phase deposition to fabricate contact holes without plasma damage Yeh, CF; Liu, CH; Su, JL
國立交通大學 2014-12-08T15:46:20Z A novel lightly doped drain polysilicon thin-film transistor with oxide sidewall spacer formed by one-step selective liquid phase deposition Shih, PS; Chang, CY; Chang, TC; Huang, TY; Peng, DZ; Yeh, CF
國立交通大學 2014-12-08T15:46:14Z Characteristics of novel polysilicon oxide by anodic oxidation Yeh, CF; Liu, JS; Chiang, MC
國立交通大學 2014-12-08T15:45:56Z Comprehensive investigation on fluorosilicate glass prepared by temperature-difference-based liquid-phase deposition Yeh, CF; Lee, YC; Wu, KH; Su, YC; Lee, SC
國立交通大學 2014-12-08T15:45:23Z Novel sidewall capping for degradation-free damascene trenches of low-permittivity methylsilsesquioxane Yeh, CF; Lee, YC; Su, YC; Wu, KH; Lin, CH
國立交通大學 2014-12-08T15:44:47Z Characterization and reliability of lightly-doped-drain polysilicon thin-film transistors with oxide sidewall spacer formed by one-step selective liquid phase deposition Shih, PS; Chang, TC; Huang, TY; Yeh, CF; Chang, CY
國立交通大學 2014-12-08T15:44:44Z Reliability of fluorinated silicon oxide film prepared by temperature difference-based liquid phase deposition Yeh, CF; Lee, YC; Lee, SC
國立交通大學 2014-12-08T15:44:36Z Novel barrier dielectric liner prepared by liquid-phase deposition and NH3-plasma annealing Yeh, CF; Lee, YC; Chen, CM; Wu, KH
國立交通大學 2014-12-08T15:41:55Z Highly reliable liquid-phase-deposited SiO2 with nitrous oxide plasma post-treatment for low-temperature-processed polysilicon thin film transistors Yeh, CF; Chen, DCH; Lu, CY; Liu, C; Lee, ST; Liu, CH; Chen, TJ
國立交通大學 2014-12-08T15:40:44Z Novel post CMP cleaning using buffered HF solution and ozone water Yeh, CF; Hsiao, CW; Lee, WS

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