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"yeh fs"
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| 國立交通大學 |
2014-12-08T15:43:55Z |
Elimination of dielectric degradation for chemical-mechanical planarization of low-k hydrogen silisesquioxane
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Chang, TC; Liu, PT; Tsai, TM; Yeh, FS; Tseng, TY; Tsai, MS; Chen, BC; Yang, YL; Sze, SM |
| 國立交通大學 |
2014-12-08T15:17:12Z |
Integration issues for siloxane-based hydrogen silsesquioxane (HSQ) applied on TFT-LCDs
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Chang, TS; Chang, TC; Liu, PT; Yeh, FS |
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