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國立交通大學 2014-12-12T02:20:50Z 多晶矽閘極滲雜濃度對以超薄氧化層製作的深次微米元件可靠度之研究 陳彥斐; Yen-Fei Chen; 張俊彥; 林鴻志; Chun-Yen Chang; Horng-Chih Lin

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