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| 臺大學術典藏 |
2020-01-13T08:23:10Z |
Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor
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Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN |
| 臺大學術典藏 |
2018-09-10T04:49:51Z |
A novel method for evaluating the thickness of silicon membrane using a micromachined acoustic wave sensor
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Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN; Chen, P.-H.; PING-HEI CHEN;Xiao, F.-Y.;Yen, K.-H.;Chen, P.-H.;Chang, P.-Z.;Pao, S.-Y.;Chen, W.-J.;Chen, Y.-Y.;Wu, T.-T.;Cheng, Y.-C.;Lee, C.-Y.;PING-HEI CHEN; Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z. |
| 臺大學術典藏 |
2018-09-10T04:49:49Z |
Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor
|
Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN |
| 國立交通大學 |
2018-08-21T05:56:37Z |
Influence of Hydrogen on the Germanium Incorporation in a-Si1-xGex:H for Thin-Film Solar Cell Application
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Wang, C. M.; Huang, Y. T.; Yen, K. H.; Hsu, H. J.; Hsu, C. H.; Zan, H. W.; Tsai, C. C. |
| 國立交通大學 |
2014-12-08T15:25:16Z |
Investigation of Cat-CVD amorphous silicon film properties under high catalyzer temperature
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Yen, K. H.; Nishizaki, S.; Ohdaira, K.; Matsumura, H.; Huang, Y. T.; Zan, H. W.; Tsai, C. C. |
| 國立臺灣大學 |
2004 |
A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor
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Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y |
Showing items 1-6 of 6 (1 Page(s) Totally)
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