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| 臺大學術典藏 |
2018-06-28T16:59:05Z |
A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor
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Xiao, Fu-Yuan; Yen, Kai-Hsiang; Chen, Ping-Hei; Chang, Pei-Zen; Pao, Shih-Yung; Chen, Wen-Jong; Chen, Yung-Yu; Wu, Tsung-Tsong; Cheng, Ying-Chou; Lee, Chi-Yuan; Lee, Chi-Yuan; Cheng, Ying-Chou; Wu, Tsung-Tsong; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen; Chen, Ping-Hei; Yen, Kai-Hsiang; Xiao, Fu-Yuan |
| 國立臺灣大學 |
2004 |
A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor
|
Lee, Chi-Yuan; Cheng, Ying-Chou; Wu, Tsung-Tsong; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen; Chen, Ping-Hei; Yen, Kai-Hsiang; Xiao, Fu-Yuan |
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