臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
元智大學	2012-05-18	A Predictive Model of Wafer Nonuniformity for Chemical Mechanical Polishing Process Considering a Retaining Ring Mechanism	Yeou-Yih Lin; Ship-Peng Lo; Shien-Yang Lin; C.S. Chiou
國立臺灣海洋大學	2012	A Three-Dimensional Atomic-Scale Finite Element Model for a Copper Nano Thin Film Subject to a Uniaxial Tension	Jinn Tong Chiu;Yeou Yih Lin;Ship Peng Lo
國立臺灣海洋大學	2008-04	Atomic-scale finite-element model of tension in nanoscale thin film	Jinn-Tong Chiu;Yeou-Yih Lin;Chi-Liu Shen;Ship-Peng Lo;Wen-Jang Wu
國立臺灣海洋大學	2008-04	Modal analysis of multi-layer structure for chemical mechanical polishing process	Jinn-Tong Chiu;Yeou-Yih Lin
國立臺灣海洋大學	2007-10	Optimization of carrier morphology in terms of Fourier sine series for chemical mechanical polishing process	Jinn-Tong Chiu;Yeou-Yih Lin

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