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國立聯合大學 |
2006 |
Exploring the sheet resistance variation with various beam current densities in low energy ion implantation
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Yi-Sheng Lai*, J. S. Chen*, H. L. Sun, Z. B. Chen, C. T. Tien, S. Y. Yeh, C. W. Chen, F. S. Lee, Y. S. Ho, P. Y. Hsu, H. H. Wu, J. H. Wang, and C. M. Yang |
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